Authors

Conard, Thierry; De Gendt, Stefan; Baklanov, Mikhaïl; Vos, Rita; Heyns, Marc; Vandervorst, Wilfried

Conference

4th International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS

Title

XPS study of the cleaning efficiency by ozone processes of protective films formed by reactive ion etching of Co and Ti silicides

Publication type

Oral presentation