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XPS study of the role of Ti and TiN caps on the Cobalt/SiO2 interface

dc.contributor.authorConard, Thierry
dc.contributor.authorKondoh, Eiichi
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-09-30T11:36:12Z
dc.date.available2021-09-30T11:36:12Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2460
dc.sourceIIOimport
dc.titleXPS study of the role of Ti and TiN caps on the Cobalt/SiO2 interface
dc.typeOral presentation
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.source.peerreviewno
dc.source.conferenceAmerican Vacuum Society 45th International Symposium; 2-6 November 1998; Baltimore, MD, USA.
dc.source.conferencelocation
imec.availabilityPublished - imec


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