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Nanoscale etching of In0.53Ga0.47As for advanced CMOS processing
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Authors
van Dorp, Dennis
;
Arnauts, Sophia
;
Cuypers, Daniel
;
Rip, Jens
;
Holsteyns, Frank
;
De Gendt, Stefan
;
Kelly, John
ISSN
2162-8769
Issue
6
Journal
ECS Journal of Solid State Science and Technology
Volume
3
Title
Nanoscale etching of In0.53Ga0.47As for advanced CMOS processing
Publication type
Journal article
Embargo date
9999-12-31
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