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Nanoscale etching of In0.53Ga0.47As for advanced CMOS processing
Publication:
Nanoscale etching of In0.53Ga0.47As for advanced CMOS processing
Date
2014
Journal article
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
van Dorp, Dennis
;
Arnauts, Sophia
;
Cuypers, Daniel
;
Rip, Jens
;
Holsteyns, Frank
;
De Gendt, Stefan
;
Kelly, John
Journal
ECS Journal of Solid State Science and Technology
Abstract
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Views
1918
since deposited on 2021-10-22
406
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations
Metrics
Views
1918
since deposited on 2021-10-22
406
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations