Publication:

Advanced experimental BEOL stability test: measurements and simulations

Date

2014

Proceedings Paper

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Author(s)

Vanstreels, Kris

;

Cherman, Vladimir

;

Gonzalez, Mario

;

De Wolf, Ingrid

;

Van der Plas, Geert

;

;

Boemmels, Juergen

;

Metrics

1895 since deposited on 2021-10-22

Acq. date: 2026-01-09