Advanced experimental BEOL stability test: measurements and simulations

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Authors
Vanstreels, Kris; Cherman, Vladimir; Gonzalez, Mario; De Wolf, Ingrid; Van der Plas, Geert; De Vos, Joeri; Boemmels, Juergen; Tokei, Zsolt
Conference
Materials for Advanced Metallization Conference - MAM
Title
Advanced experimental BEOL stability test: measurements and simulations
Publication type
Proceedings paper
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