Publication:
Replacement metal gate/high-k last technology for aggressively scaled planar and FinFET-based devices
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1905 since deposited on 2021-10-22
1last month
Acq. date: 2026-05-18
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Statistics
Views
1905 since deposited on 2021-10-22
1last month
Acq. date: 2026-05-18
Citations