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High Q photonic crystal cavities realised using deep ultraviolet lithography

dc.contributor.authorWelna, Karl
dc.contributor.authorDebnath, K.
dc.contributor.authorDumon, Pieter
dc.contributor.authorKhanna, Amit
dc.contributor.authorKrauss, T.F.
dc.contributor.authorO'Faolain, Liam
dc.date.accessioned2021-10-22T08:15:08Z
dc.date.available2021-10-22T08:15:08Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24813
dc.sourceIIOimport
dc.titleHigh Q photonic crystal cavities realised using deep ultraviolet lithography
dc.typeProceedings paper
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage161
dc.source.conference11th International Conference on Group IV Photonics - GFP
dc.source.conferencedate27/08/2014
dc.source.conferencelocationParis France
dc.identifier.urlhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=6961997
imec.availabilityPublished - open access


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