Authors

Wostyn, Kurt; Rondas, Dirk; Kenis, Karine; Loo, Roger; Hikavyy, Andriy; Douhard, Bastien; Mertens, Paul; Holsteyns, Frank; De Gendt, Stefan; D'Urzo, Lucia; Van Autryve, Luc

Conference

SiGe, Ge, and Related Compounds 6: Materials, Processing, and Devices

Title

Use of a purged FOUP to improve H-terminated silicon surface stability prior to epitaxial growth

Publication type

Proceedings paper