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Towards the understanding of intrinsic degradation and breakdown of SiOCH low-k dielectrics
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Authors
Wu, Chen
;
Li, Yunlong
;
Barbarin, Yohan
;
Ciofi, Ivan
;
Tang, Baojun
;
Kauerauf, Thomas
;
Croes, Kristof
;
Boemmels, Juergen
;
De Wolf, Ingrid
;
Tokei, Zsolt
Conference
IEEE International Reliability Physics Symposium - IRPS
Title
Towards the understanding of intrinsic degradation and breakdown of SiOCH low-k dielectrics
Publication type
Proceedings paper
Embargo date
9999-12-31
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