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Towards the understanding of intrinsic degradation and breakdown of SiOCH low-k dielectrics

dc.contributor.authorWu, Chen
dc.contributor.authorLi, Yunlong
dc.contributor.authorBarbarin, Yohan
dc.contributor.authorCiofi, Ivan
dc.contributor.authorTang, Baojun
dc.contributor.authorKauerauf, Thomas
dc.contributor.authorCroes, Kristof
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorTokei, Zsolt
dc.date.accessioned2021-10-22T08:27:39Z
dc.date.available2021-10-22T08:27:39Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24836
dc.sourceIIOimport
dc.titleTowards the understanding of intrinsic degradation and breakdown of SiOCH low-k dielectrics
dc.typeProceedings paper
dc.contributor.imecauthorWu, Chen
dc.contributor.imecauthorLi, Yunlong
dc.contributor.imecauthorCiofi, Ivan
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecWu, Chen::0000-0002-4636-8842
dc.contributor.orcidimecLi, Yunlong::0000-0003-4791-4013
dc.contributor.orcidimecCiofi, Ivan::0000-0003-1374-4116
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage3A.2.1
dc.source.endpage3A.2.6
dc.source.conferenceIEEE International Reliability Physics Symposium - IRPS
dc.source.conferencedate1/06/2014
dc.source.conferencelocationWaikoloa, HI USA
dc.identifier.urlhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=6860611&contentType=Conference+Publications
imec.availabilityPublished - open access


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