dc.contributor.author | Wu, Chen | |
dc.contributor.author | Li, Yunlong | |
dc.contributor.author | Barbarin, Yohan | |
dc.contributor.author | Ciofi, Ivan | |
dc.contributor.author | Tang, Baojun | |
dc.contributor.author | Kauerauf, Thomas | |
dc.contributor.author | Croes, Kristof | |
dc.contributor.author | Boemmels, Juergen | |
dc.contributor.author | De Wolf, Ingrid | |
dc.contributor.author | Tokei, Zsolt | |
dc.date.accessioned | 2021-10-22T08:27:39Z | |
dc.date.available | 2021-10-22T08:27:39Z | |
dc.date.issued | 2014 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/24836 | |
dc.source | IIOimport | |
dc.title | Towards the understanding of intrinsic degradation and breakdown of SiOCH low-k dielectrics | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Wu, Chen | |
dc.contributor.imecauthor | Li, Yunlong | |
dc.contributor.imecauthor | Ciofi, Ivan | |
dc.contributor.imecauthor | Croes, Kristof | |
dc.contributor.imecauthor | Boemmels, Juergen | |
dc.contributor.imecauthor | De Wolf, Ingrid | |
dc.contributor.imecauthor | Tokei, Zsolt | |
dc.contributor.orcidimec | Wu, Chen::0000-0002-4636-8842 | |
dc.contributor.orcidimec | Li, Yunlong::0000-0003-4791-4013 | |
dc.contributor.orcidimec | Ciofi, Ivan::0000-0003-1374-4116 | |
dc.contributor.orcidimec | Croes, Kristof::0000-0002-3955-0638 | |
dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 3A.2.1 | |
dc.source.endpage | 3A.2.6 | |
dc.source.conference | IEEE International Reliability Physics Symposium - IRPS | |
dc.source.conferencedate | 1/06/2014 | |
dc.source.conferencelocation | Waikoloa, HI USA | |
dc.identifier.url | http://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=6860611&contentType=Conference+Publications | |
imec.availability | Published - open access | |