A conductive AFM nanoscale analysis of NBTI and channel hot-carriers degradation in MOSFETs

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Authors

Wu, Qian; Bayerl, A.; Porti, Marc; Martin-Martinez, Javier; Lanza, Mario; Rodiguez, Rosanna; Velayudhan, Vikas; Nafria, Montserrat; Aymerich, Xavier; Gonzalez, Mireia B; Simoen, Eddy

ISSN

0018-9383

Issue

9

Journal

IEEE Transactions on Electron Devices

Volume

61

Title

A conductive AFM nanoscale analysis of NBTI and channel hot-carriers degradation in MOSFETs

Publication type

Journal article

Embargo date

9999-12-31

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