A conductive AFM nanoscale analysis of NBTI and channel hot-carriers degradation in MOSFETs

Wu, Qian; Bayerl, A.; Porti, Marc; Martin-Martinez, Javier; Lanza, Mario; Rodiguez, Rosanna; Velayudhan, Vikas; Nafria, Montserrat; Aymerich, Xavier; Gonzalez, Mireia B; Simoen, Eddy

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A conductive AFM nanoscale analysis of NBTI and channel hot-carriers degradation in MOSFETs

Date

2014

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Wu, Qian

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Bayerl, A.

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Porti, Marc

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Martin-Martinez, Javier

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IEEE Transactions on Electron Devices

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A conductive AFM nanoscale analysis of NBTI and channel hot-carriers degradation in MOSFETs

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