dc.contributor.author | Zhang, Liping | |
dc.contributor.author | de Marneffe, Jean-Francois | |
dc.contributor.author | Lukaszewicz, Mikolaj | |
dc.contributor.author | Barry-Porter, Stephen | |
dc.contributor.author | Vajda, Felim | |
dc.contributor.author | Sun, Yiting | |
dc.contributor.author | Heyne, Markus | |
dc.contributor.author | Baklanov, Mikhaïl | |
dc.contributor.author | Rutiqlian, Vito | |
dc.date.accessioned | 2021-10-22T08:56:18Z | |
dc.date.available | 2021-10-22T08:56:18Z | |
dc.date.issued | 2014 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/24887 | |
dc.source | IIOimport | |
dc.title | Effect of 147nm photons on porous Organo-Silicon Glass materials and damage improvement by optimized Cu/low-k integration approaches | |
dc.type | Meeting abstract | |
dc.contributor.imecauthor | Zhang, Liping | |
dc.contributor.imecauthor | de Marneffe, Jean-Francois | |
dc.contributor.imecauthor | Sun, Yiting | |
dc.source.peerreview | no | |
dc.source.beginpage | PS-MoM4 | |
dc.source.conference | AVS 61st International Symposium and Exhibition | |
dc.source.conferencedate | 9/11/2014 | |
dc.source.conferencelocation | Baltimore USA | |
dc.identifier.url | http://www2.avs.org/symposium2014/Papers/Paper_PS-MoM4.html | |
imec.availability | Published - imec | |