The chemistry screening for ultra low-k dielectrics plasma etching

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Authors
Zotovich, A.; Krishtab, Mikhail; Lazzarino, Frederic; Baklanov, Mikhaïl
Conference
International Conference on Micro- and Nano-Electronics
Title
The chemistry screening for ultra low-k dielectrics plasma etching
Publication type
Proceedings paper
Embargo date
9999-12-31
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