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Effect of oxidation ramp up on the redistribution of metallic contamination in gate oxides

dc.contributor.authorMertens, Paul
dc.contributor.authorRotondaro, Antonio
dc.contributor.authorMeuris, Marc
dc.contributor.authorSchmidt, Harald
dc.contributor.authorHeyns, Marc
dc.contributor.authorGräf, D.
dc.date.accessioned2021-09-29T12:43:37Z
dc.date.available2021-09-29T12:43:37Z
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/248
dc.sourceIIOimport
dc.titleEffect of oxidation ramp up on the redistribution of metallic contamination in gate oxides
dc.typeProceedings paper
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage325
dc.source.endpage331
dc.source.conferenceProceedings of the Institute of Environmental Science: 40th Annual Technical Meeting
dc.source.conferencedate01/05/1994
dc.source.conferencelocationChicago, IL USA
imec.availabilityPublished - open access


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