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Roughness study of a template for hetero-integrated FinFET

dc.contributor.authorBaranov, Gleb
dc.contributor.authorMilenin, Alexey
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-22T18:31:46Z
dc.date.available2021-10-22T18:31:46Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24968
dc.sourceIIOimport
dc.titleRoughness study of a template for hetero-integrated FinFET
dc.typeMeeting abstract
dc.contributor.imecauthorMilenin, Alexey
dc.contributor.orcidimecMilenin, Alexey::0000-0003-0747-0462
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpagena
dc.source.conferencePlasma Etch and Strip in Microtechnology - PESM
dc.source.conferencedate27/04/2015
dc.source.conferencelocationLeuven Belgium
dc.identifier.urlhttp://pesm-conference.org/files/2015_abstractbook.pdf
imec.availabilityPublished - open access


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