N7 Logic via patterning using templated DSA - implementation aspects

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Authors
Bekaert, Joost; Doise, Jan; Chan, BT; Gronheid, Roel; Ryckaert, Julien; Vandenberghe, Geert; Her, YoungJun; Cao, Yi
Conference
European Mask and Lithography Conference - EMLC
Title
N7 Logic via patterning using templated DSA - implementation aspects
Publication type
Oral presentation
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