dc.contributor.author | Bekaert, Joost | |
dc.contributor.author | Doise, Jan | |
dc.contributor.author | Chan, BT | |
dc.contributor.author | Gronheid, Roel | |
dc.contributor.author | Ryckaert, Julien | |
dc.contributor.author | Vandenberghe, Geert | |
dc.contributor.author | Her, YoungJun | |
dc.contributor.author | Cao, Yi | |
dc.date.accessioned | 2021-10-22T18:32:08Z | |
dc.date.available | 2021-10-22T18:32:08Z | |
dc.date.issued | 2015 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/24974 | |
dc.source | IIOimport | |
dc.title | N7 Logic via patterning using templated DSA - implementation aspects | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Bekaert, Joost | |
dc.contributor.imecauthor | Doise, Jan | |
dc.contributor.imecauthor | Chan, BT | |
dc.contributor.imecauthor | Gronheid, Roel | |
dc.contributor.imecauthor | Ryckaert, Julien | |
dc.contributor.imecauthor | Vandenberghe, Geert | |
dc.contributor.imecauthor | Her, YoungJun | |
dc.contributor.orcidimec | Bekaert, Joost::0000-0003-3075-3479 | |
dc.contributor.orcidimec | Chan, BT::0000-0003-2890-0388 | |
dc.source.peerreview | no | |
dc.source.conference | European Mask and Lithography Conference - EMLC | |
dc.source.conferencedate | 22/06/2015 | |
dc.source.conferencelocation | Eindhoven The Netherlands | |
imec.availability | Published - imec | |