N7 logic via patterning using templated DSA: implementation aspects

Thumbnail
Metadata
Show full item record
Authors
Bekaert, Joost; Doise, Jan; Gronheid, Roel; Ryckaert, Julien; Vandenberghe, Geert; Fenger, Germain; Her, YoungJun; Cao, Yi
Conference
Photomask Japan 2015: Photomask and Next-Generation Lithography Mask Technology XXII
Title
N7 logic via patterning using templated DSA: implementation aspects
Publication type
Proceedings paper
Collections