Wet lateral oxidation of AlGaAs for passive and active guided wave components

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Authors
De Mesel, Kurt; Sys, Carl; Caekebeke, Kristien; Verstuyft, Steven; Dhoedt, Bart; Moerman, Ingrid; Van Daele, Peter; Baets, Roel
Conference
Proceedings 3rd Annual Symposium of the IEEE/LEOS Benelux Chapter
Title
Wet lateral oxidation of AlGaAs for passive and active guided wave components
Publication type
Proceedings paper
Embargo date
9999-12-31
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