dc.contributor.author | De Mesel, Kurt | |
dc.contributor.author | Sys, Carl | |
dc.contributor.author | Caekebeke, Kristien | |
dc.contributor.author | Verstuyft, Steven | |
dc.contributor.author | Dhoedt, Bart | |
dc.contributor.author | Moerman, Ingrid | |
dc.contributor.author | Van Daele, Peter | |
dc.contributor.author | Baets, Roel | |
dc.date.accessioned | 2021-09-30T11:42:41Z | |
dc.date.available | 2021-09-30T11:42:41Z | |
dc.date.issued | 1998 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/2498 | |
dc.source | IIOimport | |
dc.title | Wet lateral oxidation of AlGaAs for passive and active guided wave components | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Verstuyft, Steven | |
dc.contributor.imecauthor | Dhoedt, Bart | |
dc.contributor.imecauthor | Moerman, Ingrid | |
dc.contributor.imecauthor | Van Daele, Peter | |
dc.contributor.imecauthor | Baets, Roel | |
dc.contributor.orcidimec | Dhoedt, Bart::0000-0002-7271-7479 | |
dc.contributor.orcidimec | Van Daele, Peter::0000-0003-0557-7741 | |
dc.contributor.orcidimec | Baets, Roel::0000-0003-1266-1319 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 109 | |
dc.source.endpage | 112 | |
dc.source.conference | Proceedings 3rd Annual Symposium of the IEEE/LEOS Benelux Chapter | |
dc.source.conferencedate | 26/11/1998 | |
dc.source.conferencelocation | Gent Belgium | |
imec.availability | Published - open access | |