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dc.contributor.authorDe Mesel, Kurt
dc.contributor.authorSys, Carl
dc.contributor.authorCaekebeke, Kristien
dc.contributor.authorVerstuyft, Steven
dc.contributor.authorDhoedt, Bart
dc.contributor.authorMoerman, Ingrid
dc.contributor.authorVan Daele, Peter
dc.contributor.authorBaets, Roel
dc.date.accessioned2021-09-30T11:42:41Z
dc.date.available2021-09-30T11:42:41Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2498
dc.sourceIIOimport
dc.titleWet lateral oxidation of AlGaAs for passive and active guided wave components
dc.typeProceedings paper
dc.contributor.imecauthorVerstuyft, Steven
dc.contributor.imecauthorDhoedt, Bart
dc.contributor.imecauthorMoerman, Ingrid
dc.contributor.imecauthorVan Daele, Peter
dc.contributor.imecauthorBaets, Roel
dc.contributor.orcidimecDhoedt, Bart::0000-0002-7271-7479
dc.contributor.orcidimecVan Daele, Peter::0000-0003-0557-7741
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage109
dc.source.endpage112
dc.source.conferenceProceedings 3rd Annual Symposium of the IEEE/LEOS Benelux Chapter
dc.source.conferencedate26/11/1998
dc.source.conferencelocationGent Belgium
imec.availabilityPublished - open access


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