Authors

Bhonsle, Rithu; Teugels, Lieve; Usman Ibrahim, Ansar; Ong, Patrick; Delande, Tinne; Krishnan, Sitaraman; Siebert, Max; Struyf, Herbert; Leunissen, Leonardus

Conference

34th CMP Users Meeting

Title

Inspection, characterization and classification of defects for improved CMP of III-V materials

Publication type

Proceedings paper