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Inspection, characterization and classification of defects for improved CMP of III-V materials

dc.contributor.authorBhonsle, Rithu
dc.contributor.authorTeugels, Lieve
dc.contributor.authorUsman Ibrahim, Ansar
dc.contributor.authorOng, Patrick
dc.contributor.authorDelande, Tinne
dc.contributor.authorKrishnan, Sitaraman
dc.contributor.authorSiebert, Max
dc.contributor.authorStruyf, Herbert
dc.contributor.authorLeunissen, Leonardus
dc.date.accessioned2021-10-22T18:33:23Z
dc.date.available2021-10-22T18:33:23Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24993
dc.sourceIIOimport
dc.titleInspection, characterization and classification of defects for improved CMP of III-V materials
dc.typeProceedings paper
dc.contributor.imecauthorTeugels, Lieve
dc.contributor.imecauthorUsman Ibrahim, Ansar
dc.contributor.imecauthorOng, Patrick
dc.contributor.imecauthorDelande, Tinne
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.orcidimecTeugels, Lieve::0000-0002-6613-9414
dc.contributor.orcidimecOng, Patrick::0000-0002-2072-292X
dc.source.peerreviewno
dc.source.conference34th CMP Users Meeting
dc.source.conferencedate29/10/2015
dc.source.conferencelocationRegensburg Germany
imec.availabilityPublished - imec


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