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Towards directed self-assembly for future CMOS scaling: A study on variability of cylindrical patterns

dc.contributor.authorBoeckx, Carolien
dc.contributor.authorDoise, Jan
dc.contributor.authorFenger, Germain
dc.contributor.authorCao, Yi
dc.contributor.authorGronheid, Roel
dc.contributor.authorDe Gendt, Stefan
dc.date.accessioned2021-10-22T18:33:53Z
dc.date.available2021-10-22T18:33:53Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25000
dc.sourceIIOimport
dc.titleTowards directed self-assembly for future CMOS scaling: A study on variability of cylindrical patterns
dc.typeProceedings paper
dc.contributor.imecauthorDoise, Jan
dc.contributor.imecauthorGronheid, Roel
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.source.peerreviewno
dc.source.conference1st International Symposium on DSA
dc.source.conferencedate25/10/2015
dc.source.conferencelocationHeverlee Belgium
imec.availabilityPublished - imec


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