Authors

Brüner, Philipp; Grehl, T.; Jourdan, Nicolas; Steinbauer, E.; Bauer, P.; Brongersma, H.

Conference

15th International Conference on Atomic Layer Deposition - ALD

Title

Low Energy Ion Scattering (LEIS) analysis of ultra-thin Ru layers on Ta- or Mn-based barriers

Publication type

Meeting abstract

Embargo date

9999-12-31