Toggle navigation
My submissions
Login
Toggle navigation
View item
imec Publications Repository
imec Publications
Conference contributions
View item
imec Publications Repository
imec Publications
Conference contributions
View item
JavaScript is disabled for your browser. Some features of this site may not work without it.
Integration and electrical evaluation of Epi-Si and Epi-SiGe channels for 3D NAND memory applications
View/
open
31432.pdf (1.259Mb)
Metadata
Show full item record
Authors
Capogreco, Elena
;
Degraeve, Robin
;
Lisoni, Judit
;
Luong, Vu
;
Arreghini, Antonio
;
Toledano Luque, Maria
;
Hikavyy, Andriy
;
Numata, Toshinori
;
De Meyer, Kristin
;
Van den Bosch, Geert
;
Van Houdt, Jan
Conference
IEEE 7th International Memory Workshop - IMW
Title
Integration and electrical evaluation of Epi-Si and Epi-SiGe channels for 3D NAND memory applications
Publication type
Proceedings paper
Embargo date
9999-12-31
Collections
Conference contributions
Search imec Publications Repository
This collection
Browse
All of imec Publications Repository
Collections
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
This collection
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
My account
login