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Integration and electrical evaluation of Epi-Si and Epi-SiGe channels for 3D NAND memory applications

dc.contributor.authorCapogreco, Elena
dc.contributor.authorDegraeve, Robin
dc.contributor.authorLisoni, Judit
dc.contributor.authorLuong, Vu
dc.contributor.authorArreghini, Antonio
dc.contributor.authorToledano Luque, Maria
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorNumata, Toshinori
dc.contributor.authorDe Meyer, Kristin
dc.contributor.authorVan den Bosch, Geert
dc.contributor.authorVan Houdt, Jan
dc.date.accessioned2021-10-22T18:36:44Z
dc.date.available2021-10-22T18:36:44Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25032
dc.sourceIIOimport
dc.titleIntegration and electrical evaluation of Epi-Si and Epi-SiGe channels for 3D NAND memory applications
dc.typeProceedings paper
dc.contributor.imecauthorCapogreco, Elena
dc.contributor.imecauthorDegraeve, Robin
dc.contributor.imecauthorLuong, Vu
dc.contributor.imecauthorArreghini, Antonio
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorDe Meyer, Kristin
dc.contributor.imecauthorVan den Bosch, Geert
dc.contributor.imecauthorVan Houdt, Jan
dc.contributor.orcidimecArreghini, Antonio::0000-0002-7493-9681
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecVan den Bosch, Geert::0000-0001-9971-6954
dc.contributor.orcidimecVan Houdt, Jan::0000-0003-1381-6925
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage109
dc.source.endpage112
dc.source.conferenceIEEE 7th International Memory Workshop - IMW
dc.source.conferencedate17/05/2015
dc.source.conferencelocationMonterey, CA USA
imec.availabilityPublished - open access


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