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Ion induced oxidation of silicon by oxygen and argon bombardment in combination with oxygen flooding

dc.contributor.authorDe Witte, Hilde
dc.contributor.authorConard, Thierry
dc.contributor.authorGouttebaron, R.
dc.contributor.authorMagnee, R.
dc.contributor.authorCaudano, R.
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorGijbels, Toon
dc.date.accessioned2021-09-30T11:44:48Z
dc.date.available2021-09-30T11:44:48Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2510
dc.sourceIIOimport
dc.titleIon induced oxidation of silicon by oxygen and argon bombardment in combination with oxygen flooding
dc.typeOral presentation
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.source.peerreviewno
dc.source.conferenceSIMS Europe Workshop; 4-6 October 1998; Munster, Germany.
dc.source.conferencelocation
imec.availabilityPublished - imec


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