Impact of process variability on BEOL TDDB lifetime model assessment

Thumbnail
Metadata
Show full item record
Authors
Croes, Kristof; Kocaay, Deniz; Ciofi, Ivan; Boemmels, Juergen; Tokei, Zsolt
Conference
IEEE International Reliability Physics Symposium - IRPS
Title
Impact of process variability on BEOL TDDB lifetime model assessment
Publication type
Proceedings paper
Collections