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Intrinisic reliability of local interconnects for N7 and beyond

dc.contributor.authorCroes, Kristof
dc.contributor.authorLesniewska, Alicja
dc.contributor.authorWu, Chen
dc.contributor.authorCiofi, Ivan
dc.contributor.authorBanczerowska, Aga
dc.contributor.authorBriggs, Basoene
dc.contributor.authorDemuynck, Steven
dc.contributor.authorTokei, Zsolt
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorSaad, Y.
dc.contributor.authorGao, Weimin
dc.date.accessioned2021-10-22T18:46:37Z
dc.date.available2021-10-22T18:46:37Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25113
dc.sourceIIOimport
dc.titleIntrinisic reliability of local interconnects for N7 and beyond
dc.typeProceedings paper
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorLesniewska, Alicja
dc.contributor.imecauthorWu, Chen
dc.contributor.imecauthorCiofi, Ivan
dc.contributor.imecauthorBriggs, Basoene
dc.contributor.imecauthorDemuynck, Steven
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.contributor.orcidimecLesniewska, Alicja::0000-0003-3863-065X
dc.contributor.orcidimecWu, Chen::0000-0002-4636-8842
dc.contributor.orcidimecCiofi, Ivan::0000-0003-1374-4116
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage2A.3
dc.source.conferenceIEEE International Reliability Physics Symposium - IRPS
dc.source.conferencedate19/04/2015
dc.source.conferencelocationMonterey, CA USA
dc.identifier.urlhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7112670
imec.availabilityPublished - open access


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