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Conference contributions
Single nanometer pattern transfer
Publication:
Single nanometer pattern transfer
Date
2015
Meeting abstract
Simple item page
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32731.pdf
1.08 MB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
de Marneffe, Jean-Francois
;
Cooke, Mike
;
Neuber, Christian
Journal
Abstract
Description
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1872
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Acq. date: 2025-10-24
Citations
Metrics
Views
1872
since deposited on 2021-10-22
405
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations