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Single nanometer pattern transfer

dc.contributor.authorde Marneffe, Jean-Francois
dc.contributor.authorCooke, Mike
dc.contributor.authorNeuber, Christian
dc.date.accessioned2021-10-22T18:50:29Z
dc.date.available2021-10-22T18:50:29Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25140
dc.sourceIIOimport
dc.titleSingle nanometer pattern transfer
dc.typeMeeting abstract
dc.contributor.imecauthorde Marneffe, Jean-Francois
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conferenceMNE Micro-Nano Engineering Conference / SNM special session
dc.source.conferencedate21/09/2015
dc.source.conferencelocationDen Haag Netherlands
imec.availabilityPublished - open access


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