dc.contributor.author | de Marneffe, Jean-Francois | |
dc.contributor.author | Zhang, Liping | |
dc.contributor.author | Rutigliani, Vito | |
dc.contributor.author | Noya, G. | |
dc.contributor.author | Cao, Yi | |
dc.contributor.author | Lesniewska, Alicja | |
dc.contributor.author | Varela Pedreira, Olalla | |
dc.contributor.author | Croes, Kristof | |
dc.contributor.author | Gillot, Christophe | |
dc.contributor.author | Tokei, Zsolt | |
dc.contributor.author | Boemmels, Juergen | |
dc.contributor.author | Baklanov, Mikhaïl | |
dc.date.accessioned | 2021-10-22T18:50:51Z | |
dc.date.available | 2021-10-22T18:50:51Z | |
dc.date.issued | 2015 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/25142 | |
dc.source | IIOimport | |
dc.title | Optimized pore stuffing for enhanced compatibility with interconnect integration flow | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | de Marneffe, Jean-Francois | |
dc.contributor.imecauthor | Zhang, Liping | |
dc.contributor.imecauthor | Lesniewska, Alicja | |
dc.contributor.imecauthor | Varela Pedreira, Olalla | |
dc.contributor.imecauthor | Croes, Kristof | |
dc.contributor.imecauthor | Tokei, Zsolt | |
dc.contributor.imecauthor | Boemmels, Juergen | |
dc.contributor.orcidimec | Lesniewska, Alicja::0000-0003-3863-065X | |
dc.contributor.orcidimec | Croes, Kristof::0000-0002-3955-0638 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 91 | |
dc.source.endpage | 94 | |
dc.source.conference | IEEE International Interconnect Technology Conference - IITC / Materials for Advanced Metallization Conference - MAM | |
dc.source.conferencedate | 18/05/2015 | |
dc.source.conferencelocation | Grenoble France | |
dc.identifier.url | http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7325639 | |
imec.availability | Published - open access | |