Metal-containing materials as turning point of EUV lithography

View/open

31954.pdf (688.6Kb)

Metadata

Show full item record

Authors

De Simone, Danilo; Pollentier, Ivan; Vandenberghe, Geert

ISSN

0914-9244

Issue

4

Journal

Journal of Photopolymer Science and Technology

Volume

28

Title

Metal-containing materials as turning point of EUV lithography

Publication type

Journal article

Embargo date

9999-12-31

Collections

Articles