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Influence of alloying the copper supply layer on the retention of CBRAM
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Authors
Devulder, Wouter
;
Opsomer, Karl
;
Jurczak, Gosia
;
Goux, Ludovic
;
Detavernier, Christophe
Conference
IEEE International Interconnect Technology Conference - IITC / Materials for Advanced Metallization Conference - MAM
Title
Influence of alloying the copper supply layer on the retention of CBRAM
Publication type
Proceedings paper
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