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Rapid thermal oxidation of porous silicon for surface passivation
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Authors
Debarge, L.
;
Stoquert, J. P.
;
Slaoui, A.
;
Stalmans, Lieven
;
Poortmans, Jef
Journal
Materials Science in Semiconductor Processing
Volume
1
Title
Rapid thermal oxidation of porous silicon for surface passivation
Publication type
Journal article
Embargo date
9999-12-31
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