Catalyst assisted low temperature pre epitaxial cleaning for Si and SiGe surfaces

Dhayalan, Sathish Kumar; Loo, Roger; Hikavyy, Andriy; Rosseel, Erik; Wostyn, Kurt; Kenis, Karine; Shimura, Yosuke; Profijt, Harald; Maes, Jan; Douhard, Bastien; Vandervorst, Wilfried

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Catalyst assisted low temperature pre epitaxial cleaning for Si and SiGe surfaces

Date

2015

Proceedings Paper

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Dhayalan, Sathish Kumar

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Shimura, Yosuke

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Profijt, Harald

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Maes, Jan

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Douhard, Bastien

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Vandervorst, Wilfried

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Catalyst assisted low temperature pre epitaxial cleaning for Si and SiGe surfaces

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