Publication:

Catalyst assisted low temperature pre epitaxial cleaning for Si and SiGe surfaces

Date

2015
Proceedings Paper
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Author(s)

Dhayalan, Sathish Kumar
;
Loo, Roger  
;
Hikavyy, Andriy  
;
Rosseel, Erik  
;
Wostyn, Kurt  
;
Kenis, Karine  
;
Shimura, Yosuke
;
Profijt, Harald
;
Maes, Jan  
;
Douhard, Bastien  
;
Vandervorst, Wilfried  

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