Authors

El Otell, Ziad; Samara, Vladimir; Zotovich, Alexey; Hansen, Terje; de Marneffe, Jean-Francois; Baklanov, Mikhaïl

ISSN

0022-3727

Issue

39

Journal

Journal of Physics D: Applied Physics

Volume

48

Title

Vacuum ultra-violet emission of CF4 & CF3I containing plasmas and their effect on low-k materials

Publication type

Journal article