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Plasma patterning of SIS modified DSA line space patterns into silicon

dc.contributor.authorEl Otell, Ziad
dc.contributor.authorSingh, Arjun
dc.contributor.authorChan, BT
dc.contributor.authorGronheid, Roel
dc.contributor.authorde Marneffe, Jean-Francois
dc.date.accessioned2021-10-22T19:11:08Z
dc.date.available2021-10-22T19:11:08Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25252
dc.sourceIIOimport
dc.titlePlasma patterning of SIS modified DSA line space patterns into silicon
dc.typeMeeting abstract
dc.contributor.imecauthorEl Otell, Ziad
dc.contributor.imecauthorSingh, Arjun
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorGronheid, Roel
dc.contributor.imecauthorde Marneffe, Jean-Francois
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.conferenceInternational Micro and Nano Engineering Conference - MNE
dc.source.conferencedate20/09/2015
dc.source.conferencelocationDen Haag the Netherlands
imec.availabilityPublished - open access


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