Publication:
FinFET stressor efficiency on alternative wafer and channel orientations for the14nm node and beyond
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1818 since deposited on 2021-10-22
1last month
Acq. date: 2026-09-13
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Statistics
Views
1818 since deposited on 2021-10-22
1last month
Acq. date: 2026-09-13
Citations