Publication:
Micromechanical ring resonators with a 2D phononic crystal support for mechanical robustness and providing mask misalignment toelerance
Date
Loading...
Files
Journal
Abstract
Description
Statistics
Views
1856 since deposited on 2021-10-22
3last month
Acq. date: 2026-04-27
Citations
Statistics
Views
1856 since deposited on 2021-10-22
3last month
Acq. date: 2026-04-27
Citations