Publication:
Micromechanical ring resonators with a 2D phononic crystal support for mechanical robustness and providing mask misalignment toelerance
Date
Loading...
Files
Journal
Abstract
Description
Metrics
Views
1852 since deposited on 2021-10-22
Acq. date: 2025-12-16
Citations
Metrics
Views
1852 since deposited on 2021-10-22
Acq. date: 2025-12-16
Citations