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Micromechanical ring resonators with a 2D phononic crystal support for mechanical robustness and providing mask misalignment toelerance

dc.contributor.authorFigeys, Bruno
dc.contributor.authorNauwelaers, Bart
dc.contributor.authorTilmans, Harrie
dc.contributor.authorRottenberg, Xavier
dc.date.accessioned2021-10-22T19:15:23Z
dc.date.available2021-10-22T19:15:23Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25272
dc.sourceIIOimport
dc.titleMicromechanical ring resonators with a 2D phononic crystal support for mechanical robustness and providing mask misalignment toelerance
dc.typeProceedings paper
dc.contributor.imecauthorFigeys, Bruno
dc.contributor.imecauthorNauwelaers, Bart
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.orcidimecFigeys, Bruno::0000-0002-0108-3907
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1016
dc.source.endpage1019
dc.source.conference28th International Conference on Micro Electro Mechanical Systems - MEMS
dc.source.conferencedate18/01/2015
dc.source.conferencelocationEstoril Portugal
dc.identifier.urlhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7051134
imec.availabilityPublished - open access


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