dc.contributor.author | Figeys, Bruno | |
dc.contributor.author | Nauwelaers, Bart | |
dc.contributor.author | Tilmans, Harrie | |
dc.contributor.author | Rottenberg, Xavier | |
dc.date.accessioned | 2021-10-22T19:15:23Z | |
dc.date.available | 2021-10-22T19:15:23Z | |
dc.date.issued | 2015 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/25272 | |
dc.source | IIOimport | |
dc.title | Micromechanical ring resonators with a 2D phononic crystal support for mechanical robustness and providing mask misalignment toelerance | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Figeys, Bruno | |
dc.contributor.imecauthor | Nauwelaers, Bart | |
dc.contributor.imecauthor | Tilmans, Harrie | |
dc.contributor.imecauthor | Rottenberg, Xavier | |
dc.contributor.orcidimec | Figeys, Bruno::0000-0002-0108-3907 | |
dc.contributor.orcidimec | Tilmans, Harrie::0000-0003-4240-4962 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 1016 | |
dc.source.endpage | 1019 | |
dc.source.conference | 28th International Conference on Micro Electro Mechanical Systems - MEMS | |
dc.source.conferencedate | 18/01/2015 | |
dc.source.conferencelocation | Estoril Portugal | |
dc.identifier.url | http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7051134 | |
imec.availability | Published - open access | |