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The effects of geometry and chemistry of nanopatterned substrates on the directed self assembly of block copolymers
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Authors
Garner, Grant
;
Williamson, L.
;
Seidel, R.
;
Hur, S.
;
de Pablo, J.
;
Rincon Delgadillo, Paulina
;
Gronheid, Roel
Conference
Alternative Lithographic Technologies VII
Title
The effects of geometry and chemistry of nanopatterned substrates on the directed self assembly of block copolymers
Publication type
Proceedings paper
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