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The effects of geometry and chemistry of nanopatterned substrates on the directed self assembly of block copolymers

dc.contributor.authorGarner, Grant
dc.contributor.authorWilliamson, L.
dc.contributor.authorSeidel, R.
dc.contributor.authorHur, S.
dc.contributor.authorde Pablo, J.
dc.contributor.authorRincon Delgadillo, Paulina
dc.contributor.authorGronheid, Roel
dc.date.accessioned2021-10-22T19:18:55Z
dc.date.available2021-10-22T19:18:55Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25288
dc.sourceIIOimport
dc.titleThe effects of geometry and chemistry of nanopatterned substrates on the directed self assembly of block copolymers
dc.typeProceedings paper
dc.contributor.imecauthorRincon Delgadillo, Paulina
dc.contributor.imecauthorGronheid, Roel
dc.source.peerreviewyes
dc.source.beginpage94231K
dc.source.conferenceAlternative Lithographic Technologies VII
dc.source.conferencedate22/02/2015
dc.source.conferencelocationsan Jose, CA USA
dc.identifier.urlhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2245964
imec.availabilityPublished - imec
imec.internalnotesProceedings of SPIE; Vol. 9423


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