Amorphous inclusions during Ge and GeSn epitaxial growth via chemical vapor deposition

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Authors
Gencarelli, Federica; Shimura, Yosuke; Kumar, Arul; Vincent, Benjamin; Moussa, Alain; Vanhaeren, Danielle; Richard, Olivier; Bender, Hugo; Vandervorst, Wilfried; Caymax, Matty; Loo, Roger; Heyns, Marc
ISSN
0040-6090
Journal
Thin Solid Films
Volume
590
Title
Amorphous inclusions during Ge and GeSn epitaxial growth via chemical vapor deposition
Publication type
Journal article
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