Amorphous inclusions during Ge and GeSn epitaxial growth via chemical vapor deposition

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Author(s)

Gencarelli, Federica

;

Shimura, Yosuke

;

;

Vincent, Benjamin

;

;

Vanhaeren, Danielle

;

Richard, Olivier

;

;

Vandervorst, Wilfried

;

;

;

Journal

Thin Solid Films

Metrics

1974 since deposited on 2021-10-22

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Acq. date: 2025-10-25