Aqueous chemical solution deposition of LuFeO3 ultra high-k films

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Authors
Gielis, Sven; Ivanov, Maksim; Peys, Nick; Van den Ham, Jonathan; Pavlovic, Nikolina; Robaeys, Pieter; Nesladek, Milos; Banys, Juras; Hardy, An; Van Bael, Marlies
Conference
39th International Conference and Expostion on Advanced Ceramics and Composites
Title
Aqueous chemical solution deposition of LuFeO3 ultra high-k films
Publication type
Oral presentation
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