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Aqueous chemical solution deposition of LuFeO3 ultra high-k films

dc.contributor.authorGielis, Sven
dc.contributor.authorIvanov, Maksim
dc.contributor.authorPeys, Nick
dc.contributor.authorVan den Ham, Jonathan
dc.contributor.authorPavlovic, Nikolina
dc.contributor.authorRobaeys, Pieter
dc.contributor.authorNesladek, Milos
dc.contributor.authorBanys, Juras
dc.contributor.authorHardy, An
dc.contributor.authorVan Bael, Marlies
dc.date.accessioned2021-10-22T19:24:54Z
dc.date.available2021-10-22T19:24:54Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25315
dc.sourceIIOimport
dc.titleAqueous chemical solution deposition of LuFeO3 ultra high-k films
dc.typeOral presentation
dc.contributor.imecauthorNesladek, Milos
dc.contributor.imecauthorHardy, An
dc.contributor.imecauthorVan Bael, Marlies
dc.contributor.orcidimecVan Bael, Marlies::0000-0002-5516-7962
dc.source.peerreviewno
dc.source.conference39th International Conference and Expostion on Advanced Ceramics and Composites
dc.source.conferencedate25/01/2015
dc.source.conferencelocationFlorida USA
imec.availabilityPublished - imec


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