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Impact of a SADP flow on the design and process for N10/N7 layers

dc.contributor.authorGillijns, Werner
dc.contributor.authorSherazi, Yasser
dc.contributor.authorTrivkovic, Darko
dc.contributor.authorChava, Bharani
dc.contributor.authorVandewalle, B.
dc.contributor.authorGerousis, V.
dc.contributor.authorRaghavan, Praveen
dc.contributor.authorRyckaert, Julien
dc.contributor.authorMercha, Abdelkarim
dc.contributor.authorVerkest, Diederik
dc.contributor.authorMcIntyre, Greg
dc.contributor.authorRonse, Kurt
dc.date.accessioned2021-10-22T19:25:53Z
dc.date.available2021-10-22T19:25:53Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25319
dc.sourceIIOimport
dc.titleImpact of a SADP flow on the design and process for N10/N7 layers
dc.typeProceedings paper
dc.contributor.imecauthorGillijns, Werner
dc.contributor.imecauthorSherazi, Yasser
dc.contributor.imecauthorTrivkovic, Darko
dc.contributor.imecauthorRyckaert, Julien
dc.contributor.imecauthorMercha, Abdelkarim
dc.contributor.imecauthorVerkest, Diederik
dc.contributor.imecauthorRonse, Kurt
dc.contributor.orcidimecGillijns, Werner::0000-0002-2430-7360
dc.contributor.orcidimecMercha, Abdelkarim::0000-0002-2174-6958
dc.contributor.orcidimecVerkest, Diederik::0000-0001-6567-2746
dc.contributor.orcidimecRonse, Kurt::0000-0003-0803-4267
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage942709
dc.source.conferenceDesign-Process-Technology Co-optimization for Manufacturability IX
dc.source.conferencedate7/02/2015
dc.source.conferencelocationSan Jose, CA USA
dc.identifier.urlhttp://spie.org/Publications/Proceedings/Paper/10.1117/12.2085923
imec.availabilityPublished - open access
imec.internalnotesProceedings of SPIE; Vol. 9427


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