Impact of a SADP flow on the design and process for N10/N7 layers

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Authors
Gillijns, Werner; Sherazi, Yasser; Trivkovic, Darko; Chava, Bharani; Vandewalle, B.; Gerousis, V.; Raghavan, Praveen; Ryckaert, Julien; Mercha, Abdelkarim; Verkest, Diederik; McIntyre, Greg; Ronse, Kurt
Conference
Design-Process-Technology Co-optimization for Manufacturability IX
Title
Impact of a SADP flow on the design and process for N10/N7 layers
Publication type
Proceedings paper
Embargo date
9999-12-31
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