Publication:

Impact of a SADP flow on the design and process for N10/N7 layers

Date

2015
Proceedings Paper
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cris.virtual.orcid0000-0003-0803-4267
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dc.contributor.authorGillijns, Werner
dc.contributor.authorSherazi, Yasser
dc.contributor.authorTrivkovic, Darko
dc.contributor.authorChava, Bharani
dc.contributor.authorVandewalle, B.
dc.contributor.authorGerousis, V.
dc.contributor.authorRaghavan, Praveen
dc.contributor.authorRyckaert, Julien
dc.contributor.authorMercha, Abdelkarim
dc.contributor.authorVerkest, Diederik
dc.contributor.authorMcIntyre, Greg
dc.contributor.authorRonse, Kurt
dc.contributor.imecauthorGillijns, Werner
dc.contributor.imecauthorSherazi, Yasser
dc.contributor.imecauthorTrivkovic, Darko
dc.contributor.imecauthorRyckaert, Julien
dc.contributor.imecauthorMercha, Abdelkarim
dc.contributor.imecauthorVerkest, Diederik
dc.contributor.imecauthorRonse, Kurt
dc.contributor.orcidimecGillijns, Werner::0000-0002-2430-7360
dc.contributor.orcidimecMercha, Abdelkarim::0000-0002-2174-6958
dc.contributor.orcidimecVerkest, Diederik::0000-0001-6567-2746
dc.contributor.orcidimecRonse, Kurt::0000-0003-0803-4267
dc.date.accessioned2021-10-22T19:25:53Z
dc.date.available2021-10-22T19:25:53Z
dc.date.embargo9999-12-31
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25319
dc.identifier.urlhttp://spie.org/Publications/Proceedings/Paper/10.1117/12.2085923
dc.source.beginpage942709
dc.source.conferenceDesign-Process-Technology Co-optimization for Manufacturability IX
dc.source.conferencedate7/02/2015
dc.source.conferencelocationSan Jose, CA USA
dc.title

Impact of a SADP flow on the design and process for N10/N7 layers

dc.typeProceedings paper
dspace.entity.typePublication
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