Impact of a SADP flow on the design and process for N10/N7 layers

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Author(s)

Gillijns, Werner

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Sherazi, Yasser

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Trivkovic, Darko

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;

;

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Raghavan, Praveen

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Ryckaert, Julien

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Mercha, Abdelkarim

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Verkest, Diederik

;

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Metrics

2016 since deposited on 2021-10-22

3last month

Acq. date: 2025-12-08