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Plasma enhanced atomic layer deposition of two-dimensional WS2 from WF6, H2S and H2 plasma precursors

dc.contributor.authorGroven, Benjamin
dc.contributor.authorHeyne, Markus
dc.contributor.authorHaesevoets, Karel
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorNuytten, Thomas
dc.contributor.authorConard, Thierry
dc.contributor.authorVerdonck, Patrick
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorHeyns, Marc
dc.contributor.authorRadu, Iuliana
dc.contributor.authorDelabie, Annelies
dc.contributor.authorCaymax, Matty
dc.date.accessioned2021-10-22T19:31:48Z
dc.date.available2021-10-22T19:31:48Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25342
dc.sourceIIOimport
dc.titlePlasma enhanced atomic layer deposition of two-dimensional WS2 from WF6, H2S and H2 plasma precursors
dc.typeProceedings paper
dc.contributor.imecauthorGroven, Benjamin
dc.contributor.imecauthorHaesevoets, Karel
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorNuytten, Thomas
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorRadu, Iuliana
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorCaymax, Matty
dc.contributor.orcidimecGroven, Benjamin::0000-0002-5781-7594
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.contributor.orcidimecNuytten, Thomas::0000-0002-5921-6928
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecRadu, Iuliana::0000-0002-7230-7218
dc.source.peerreviewyes
dc.source.conference15th International Conference on Atomic Layer Deposition - ALD
dc.source.conferencedate28/06/2015
dc.source.conferencelocationPortland, OR USA
imec.availabilityPublished - imec


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